Nano-OP series

  • 고속피에조 나노포지터
  • 다축 모션에 스택 가능
  • 30, 65, 100μm 운동 범위
  • 폐쇄 루프 컨트롤
설명

설명

Product Description

The Nano-OP Series is a versatile group of compact piezo nanopositioners which can be configured to fit into a wide variety of applications. Individual, single axis stages may be combined to form multi-axis systems. The Nano-OP Series are available with 30, 65, and 100 micron ranges of motion. They can be constructed from aluminum, invar, or titanium and can be customized to suit unique requirements. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer resolution under closed loop control.

For applications requiring high speed objective lens positioning, see the High Speed Lens Positioner page. The Nano-OP Series is available with metric tapped holes, see the Nano-OP-M Series Drawing. For applications requiring a through hole, see the Nano-OPH Series.

 

Technical Specifications

Range of motion (Nano-OP30) 30 μm
Range of motion (Nano-OP65) 65 μm
Range of motion (Nano-OP100) 100 μm
Resolution (30/65/100 μm) 0.06/0.13/0.2 nm
Resonant Frequency 4 kHz ±20%
Resonant Frequency (100g load) 2 kHz ±20%
Stiffness 3.0 N/μm ±20%
θ roll, θ pitch (typical) ≤1 μrad
θ yaw (typical) ≤2 μrad
Recommended max. load (horizontal)* 1.0 kg
Recommended max. load (vertical)* 0.5 kg
Body Material Al, Invar or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

 

Nano-OP30 Position Noise Spectrum

 

Additional Information

Nano-OP Series Drawing
Nano-OP Series Catalog Pages
Nano-OP-M Series Drawing
special order version with metric tapped holes