Technical Specifications
|
Ranges of motion (Nano-Align6-100) |
100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ) |
Ranges of motion (Nano-Align6-200) |
200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ) |
Resolution (Nano-Align6-100) |
0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ) |
Resolution (Nano-Align6-200) |
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ) |
Resonant Frequencies |
|
X axis (Nano-Align6-100/Nano-Align6-200) |
450/400 Hz ±20% |
Y axis (Nano-Align6-100/Nano-Align6-200) |
350/300 Hz ±20% |
Z axis (Nano-Align6-100/Nano-Align6-200) |
450/350 Hz ±20% |
Recommended max. load (horizontal)* |
0.5 kg |
Recommended max. load (vertical)* |
0.2 kg |
Body Material |
Aluminum, Titanium or Invar |
Controller |
Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |