설명
Product Description |
| The Nano-Align6 is a six axis (X, Y, Z, θX , θY, θZ) piezo nanopositioning system with a large center aperture. The Nano-Align6 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis. The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQ® technology for absolute position measurement and picometer/nanoradian accuracy under closed loop control.
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Technical Specifications |
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| Ranges of motion (Nano-Align6-100) | 100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ) |
| Ranges of motion (Nano-Align6-200) | 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ) |
| Resolution (Nano-Align6-100) | 0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ) |
| Resolution (Nano-Align6-200) | 0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ) |
| Resonant Frequencies | |
| X axis (Nano-Align6-100/Nano-Align6-200) | 450/400 Hz ±20% |
| Y axis (Nano-Align6-100/Nano-Align6-200) | 350/300 Hz ±20% |
| Z axis (Nano-Align6-100/Nano-Align6-200) | 450/350 Hz ±20% |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum, Titanium or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information |
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Nano-Align6 Series Drawing |
Nano-Align6 Series Catalog Pages |
